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μ-301c

Model：Lab Coater - 3
The Lab Coater series offers a compact economical solution suitable for many process applications. Its small size will ensure you can find a space in your lab and in your budget....
　
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Features
Dimensions
Specifications
Package
Advantage

• Clam shell chamber for improved accessibility
• Compact, space-saving design
• Available as glovebox integrated and stand alone
• Ready for glove box integration and stand alone
• For substrates up to 70 x 70 mm or 100 mm wafers
• 2 source configurations
• Recipe based advanced multi-layer deposition control with user logon control
• Sequential or co-deposition
• International input voltages available
• Our detailed training manual teaches new users how to operate and maintain the equipment
• User safety is held paramount with features such as cutting power to sources when the chamber is open
• Shielded view port for visual process monitoring
• Recipe programmable PC control
• Removable protective shielding
• Compatible with most standard deposition sources
• Ergonomic to operate, easy to clean
• All stainless steel construction
• UL listed and CE compliant
• Factory training included with every system
• 2-year warranty with responsive and caring customer service

Product Dimensions

• Internal dimensions: 800mm (L) x 700mm (W) x 830mm (H) (31.5" x 27.6" x 32.6")

• External dimensions: 1500mm (L) x 965mm (W) x 1590mm (H) (59.0" x 38.0" x 62.6")

Shipping Dimension

• 1600mm(L) x 880mm (W) x 1000mm (H) (63.0" x 34.6" x 39.3")

Shipping Weight

• 300 kg (661.3lbs)

α-1200U-P-400R Glovebox
Structure
Volume	• Approx. 0.8 m³
Electrical power	• 230 V/50-60 Hz, 10 A / • 115 V/50-60 Hz, 20 A / • 100 V/ 50-60 Hz, 20 A
Vacuum Chamber
TYPE	• Material: Stainless Steel 1.4301 (US type 304), thickness 3 mm • Glovebox inside dimensions: 1140mm(L) x 750mm(W) x 900mm(H)
Box Windows	• Inclined panel: Safety Glass 8 mm *Lexan thickness 10 mm on request • Dimensions: 1120mm(L) x 860mm(W)
Glove Ports	• Tekaform 220 mm dia., O-ring sealed
Gloves	• Material: Butyl, thickness 0.4 mm
Filter System	• Inlet and Outlet filter can eliminate particle size > 0.3μm
Lighting	• Fluorescent lamp: Front mounted
Leak Rate	• Leak Rate According to ISO 10648-2 (Oxygen Method) < 0.05 vol%/h typical (Class 1, measured at final acceptance test) • Leak Rate According to ISO 25412 (Press. Change Method) < 0.05 vol%/h at negative pressure of 10 mbar at constant temp.
Gas Purification
TYPE	• Automated Removal of H₂O and O₂ • Automated Regeneration Process • Gas circulation: Closed loop gas recirculation
Working Gas	• Inert gas: Nitrogen, Argon or Helium • Regenerating gas: For regenerating both oxygen and H₂O remover: use mixture of H₂ (5-10%) and Operating gas
Vacuum Pump	Type: Rotary vane pump, oil mist filter, oil recirculation, automatic gas ballast control Operation: 12 m³/h (7 cfm), dual stage, ultimate vacuum < 3 x 10^-2 mbar Dry pump on request
Circulation Unit	• Type: Integrated blower vacuum-tight, oil-free • Flow rate: 20 m³/h
Leak Rate	• Less than 10^-5 mbar I/s
Valves	• Main valves: Electro-pneum. DN 40
Leak Rate	• Leak Rate According to ISO 10648-2 (Oxygen Method) < 0.05 vol%/h typical (Class 1, measured at final acceptance test) • Leak Rate According to ISO 25412 (Press. Change Method) < 0.05 vol%/h at negative pressure of 10 mbar at constant temp.
Antechamber
Main Antechamber	• Material: Stainless Steel 1.4301 (US type 304), thickness 3 mm • inside dimensions: 360mm(Φ) x 600mm(L)
Mini Antechamber	• Material: Stainless Steel 1.4301 (US type 304), thickness 3 mm • inside dimensions: 150mm(Φ) x 300mm(L)
Purging System
TYPE	• Automatic Purging System allows easy operating and reduces gas consumption
Analyzer
O₂-Analyzer	• Dimension：Length 205 mm, width 80 mm, depth 60 mm • Effective Rang : 0 to 500 ppm(v) *Other Analyzer on request
H₂O-Analyzer	• Dimension：Length 205 mm, width 80 mm, depth 60 mm • Effective Rang : 0 to 1000 ppm(v) *Other Analyzer on request
Solvent Removal
TYPE	• Material: Stainless Steel 1.4301 (US type 304), thickness 3 mm • inside dimensions: 220mm(Φ) x 450mm(H)
The system can be extended with the following optional components
Vacuum feedthrough with two valves	• Case Material: Stainless Steel 304
Electrochemical signal feedthrough (4 or 8 pins)	• Case Material: Stainless Steel 304
Freezers temperature settable, minimum -35^oC	• Inside dimensions:423 mm (h) x 266 mm (w) x 162.5 mm (d) • Volume:18L
Microscopes and CCD Camera Systems	•Equipment for microscopic analysis of glovebox contents, video analysis and video-assisted motion.
Cold well with cover	•Different sized cold wells for cold storage and cold reaction manipulations
Upgrade to dual purification columns	• Dual purification columns
Upgrade to regenerable organic solvent adsorber
Cooling Fan	•Glovebox integrated cooling fan.
Other
Compliance	• UL certified glove box is available upon request with extra cost
Warranty	• One Year limited warranty with lifetime support • Rusting and damage due to improper storage condition or maintenance are not covered by warranty • Gloves are consumable items and are NOT covered by warranty • The Oxygen Sensor is a consumable component NOT covered by warranty. Please use the videos below for properly 1) Replacing a worn unit and 2) Storing the sensor to ensure maximum longevity when not used
Application Notes & Warnings	• The interconnections between the glove box chamber and the gas purification system must be unimpeded during the purification cycles. • The use of corrosive gases is prohibited as they will damage the water and oxygen sensors. • Regularly perform regeneration to maintain the optimum purification efficiency. • The O₂ removing rate is largely dependent on the type of purging gas used. For faster chamber purging process, Nitrogen is preferred over Argon due to its lighter mass. • Corrosive liquid (such as LiPF6 electrolyte) must be remain sealed in a container inside the glove box. Otherwise, liquid vapour may condense and corrode the steel chamber and purification pipeline.

Part description	Quantity	Part image
Quick Clamp KF 40	1 pc
NW/KF-40 Blank Flange	4 pcs
Glovebox glove	1 pair
Oxygen Analyser	1 pc
Moisture Analyser	1 pc
Glovebox Manual	1 pcs

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